Principles of Lithography Third Edition (SPIE Press Monograph Vol. PM198)

ThepublicationofPrinciplesofLithography,ThirdEditionjustfiveyearsafterthepreviouseditionisevidenceofthequicklychangingandexcitingnatureoflithographyasappliedtotheproductionofintegratedcircuitsandothermicro-andnanoscaledevices.Thistextisintendedtoserveasanintroductiontothescienceof