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Fabrication of a complexshaped mirror

上传者: 2019-09-04 02:41:37上传 PDF文件 500kb 热度 31次
Weproposeanddiscussseveralfabricationprocessesforacomplex-shapedmirror,whichisafly-eyemirror,usedinanextremeultravioletlithography(EUVL)illuminationsystem.Themirrorhasacomplexreflectivesurfaceconsistingofmanyconcavemirrorelementsthataresectionsofasphere;thetopofeachelementisarcshape
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