Fabrication of a complexshaped mirror
Weproposeanddiscussseveralfabricationprocessesforacomplex-shapedmirror,whichisafly-eyemirror,usedinanextremeultravioletlithography(EUVL)illuminationsystem.Themirrorhasacomplexreflectivesurfaceconsistingofmanyconcavemirrorelementsthataresectionsofasphere;thetopofeachelementisarcshape
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