Robust Optimization Design in MEMS
Thisreportintroducesarobustdesigntechniqueformicro-electro-mechanicalsystems(MEMS)subjecttoinherentgeometricandmaterialuncertainties.AlthoughdesignhasplayedanimportantroleinMEMSdevelopment,littlehasbeendonetoaccountfortheuncertaintiesassociatedwithMEMSfabrication.Currentfabricationtechnique
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