Inertial MEMS: Principles and Practice
Apracticalandsystematicoverviewofthedesign,fabricationandtestofMEMS-basedinertialsensors,thiscomprehensiveandrigorousguideshowsyouhowtoanalyzeandtransformapplicationrequirementsintopracticaldesigns,andhelpsyoutoavoidpotentialpitfallsandtocutdesigntime.Withthisbookyou'llsoonbeup
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