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  4. The effect of ultrasonic vibration and surfactant additive on fabrication of 53.

The effect of ultrasonic vibration and surfactant additive on fabrication of 53.

上传者: 2021-02-20 19:35:42上传 PDF文件 767.75KB 热度 9次
The effect of ultrasonic vibration and surfactant additive on fabrication of 53.5 gr/mm silicon echelle grating with low surface roughness in alkaline KOH solution
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